SimPlasma

RF-ICPs are used in a wide variety of industrial applications, e.g., chemical vapor deposition of thin films, analytical chemistry, spray coatings, destruction of hazardous waste, powder treatment, etc.

SimPlasma simultaneously solves the equations for the transport of mass, momentum, and energy, along with Maxwells™s equations. It can be used to predict the effect of DC and RF powers, mass flow rates of plasma and peripheral gases, and pressure on the temperature and velocity profiles inside the reactor.

To request more information, a quote or demo please follow this link

Leave a Comment